Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis (Materials Science and Process Technology) Book PDF, ePub eBook

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Book Descriptions:
Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis (Materials Science and Process Technology) by Jerome J. Cuomo, Stephen M. Rossnagel, Harold R. Kaufman

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